STANGL- LINEA INLINE WET PROCESS

Product Briefing Outline:

STANGL Semiconductor Equipment AG (STANGL), producer of qualified wet process equipment, introduces its new LINEA Inline wet process equipment for PV Si cells.
LINEA is a horizontally working inline wet process platform for cleaning and etching of crystalline solar wafers.

PROBLEM

There aren’t many providers of wet-chemical machines for both crystalline silicon and thin-film solar technology.

SOLUTION

Stangl´s LINEA inline etching system can be configured up to max. 1,700 or 3,400 wafers per hour (156mm), which equals a production capacity of 30 and 60 MW. LINEA completes the portfolio of Stangl’s integrated wet process solutions for solar cell manufacturing lines.
The LINEA design is based on a newly developed sophisticated transport system and a special chemical flow system to process the wafers horizontally with a very low breakage rate (<0.1%) and a high etching uniformity. Combined with Stangl’s machines, Singulus has been marketing its own solar coating machine with wet-chemical and vacuum coating processes for a production line for crystalline silicon solar cells.

APPLICATIONS

Stangl’s new system LINEA follows the trend towards handling solar wafers down to 150 µm.
Not only the highly integrated design and a high throughput, but also the high availability and low breakage rate make LINEA attractive for solar cell manufacturers worldwide. Furthermore, LINEA is characterized by its high flexibility concerning wafer type, size and thickness as well as its reduced chemical consumption