AMB APPARATE +MASCHINENBAU Basic Line

Product Briefing Outline:

High efficiency, smooth wafer handling, easy operation and maintenance are features of the new wafer handling system BASIC LINE. The system loads und unloads inline wet benches with a high level of reliability.

Problem

The system faces the need for cost-efficient, automated loading and unloading functions for a more efficient production.

Solution

The insert core of the BASIC LINE is the new high-speed four arm robot system combined with a new type of gripper. This enables a high throughput with a smooth wafer handling at the same time. On the loading side the wafers can be loaded to the system either in cassettes or stack magazine boxes. From here the wafers are transported to the pick up position of the robot. The robot transfers the wafers to the loading belt for the wet bench. During this transfer a camera system checks each wafer on the fly and in case of defects wafers are discharged automatically.

On the unloading side the system takes over the wafers from the wet bench on an unloading belt. On this belt the wafers position is detected by a camera. With this information the robot picks up each wafer. Another camera system checks each wafer on defects. The wafers can be transferred into cassettes or stack magazine boxes.

Applications

Wafer type: Multi- and Mono-crystalline silicon

Wafer geometry: Square and pseudo-square

Wafer thickness: 130–300 micro meters

capacity:  approx. 3000 wafer/hour

Platform

All components of the BASIC LINE are mounted on a heavy duty welded steel frame. Due to modular design components can be exchanged very easily.

Availability

June 2009