SINGULUS TECHNOLOGIES developed a new solar coating machine named SINGULAR,

Problem

The PV market requires fully automated and cost effective systems for coating of anti-reflective and passivation layer on photovoltaic silicon cells.

Solution

SINGULUS TECHNOLOGIES is launching its new SINGULAR Inline Deposition System for Silicon Cell Production. SINGULAR is a PECVD coating equipment for crystalline silicon solar cells, which meet the demands for today’s and future PV cell production.

The SINGULAR inline system is an innovative inline concept for high output industrial production.  Advanced layer characteristics are guaranteed by high quality coatings.

The new system is a fully automated system for coating of the anti-reflective and passivation layer on photovoltaic silicon cells. The essential benefit of inline technology is the transport and processing of small substrate production lots, which guarantees stable process, continuous output, flexibility and a small footprint.

The SINGULAR is available on two basic versions. The guaranteed net capacity for an integrated is 1200 Wafer/h or 1500 Wafer/h depending of the number of installed deposition sources

Up to three SINGULAR can be installed into a production to rise up the net output capacity to over 4500 wafers/hour.

Every SINGULAR is autarkic to keep up the productivity during maintenance of the other module(s). Additionally, uptime is high due to automatic inline chamber cleaning that does not interrupt the throughput during production.

The SINGULAR has its own proprietary automated handling for loading and unloading the wafers gently to minimize wafer breakage.

Contact:

Bernhard Krause

Tel: + 49 (0) 6181-9828020

Web: www.singulus.de