Member Directory
E+H Metrology GmbH
CONTACT:
A: Benzstr. 5 – 9, 76185 Karlsruhe, Germany
T: +49 721 83118-0
E: info@eh-metrology.com
COMPANY OVERVIEW
Since1968, E+H Metrology has supplied a wide range of high precision, high speed and reliable metrology tools for Semiconductor “in process” applications and R&D.
E+H Metrology has been supporting the first PV applications since the early 90s and has a reputation for highly repeatable measurement results.
The product range starts with simple manual or embedded systems and scales up to fully automated metrology systems.
Our tool applications are Incoming Inspection, Sample Production Measurements, Process Qualification, Qualification of Production Tools, R&D and Engineering, Reference Measurements.
Our metrology specialities are Geometry, Stress, Thickness, Resistivity, Warp, Waviness and Roughness.
PRODUCTS
· MX 152 (OEM module for PV sorters measuring Thk, Res and P/N)
· MX 203-6-41-q (manual R&D geometry tool)
· MX 204-8-49-q (automatic R&D geometry tool)
· MX 604 (resistivity tool for silicon blocks)